Photomodulated Optical Reflectance | A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon | Janusz Bogdanowicz | Taschenbuch | Springer Theses | Paperback | XXIV | Englisch | 2014 - Livro de bolso
2014, ISBN: 9783642426865
[ED: Taschenbuch], [PU: Springer-Verlag GmbH], One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plet… mais…
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2017, ISBN: 9783642426865
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2012, ISBN: 9783642426865
*Photomodulated Optical Reflectance* - A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon. Auflage 2012 / Taschenbuch für 106.99 € / Aus dem Bereich: Bücher, Wissen… mais…
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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon (Springer Theses) - Livro de bolso
ISBN: 9783642426865
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ISBN: 9783642426865
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Photomodulated Optical Reflectance | A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon | Janusz Bogdanowicz | Taschenbuch | Springer Theses | Paperback | XXIV | Englisch | 2014 - Livro de bolso
2014, ISBN: 9783642426865
[ED: Taschenbuch], [PU: Springer-Verlag GmbH], One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plet… mais…
2017, ISBN: 9783642426865
[ED: Taschenbuch], [PU: Springer Berlin Heidelberg], Neuware - One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions… mais…
2012
ISBN: 9783642426865
*Photomodulated Optical Reflectance* - A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon. Auflage 2012 / Taschenbuch für 106.99 € / Aus dem Bereich: Bücher, Wissen… mais…
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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon (Springer Theses) - Livro de bolso
ISBN: 9783642426865
paperback. Good. Access codes and supplements are not guaranteed with used items. May be an ex-library book., 2.5
ISBN: 9783642426865
Livre, [PU: Springer, Berlin/Heidelberg/New York, NY]
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Dados detalhados do livro - Photomodulated Optical Reflectance
EAN (ISBN-13): 9783642426865
ISBN (ISBN-10): 3642426867
Livro de capa dura
Livro de bolso
Ano de publicação: 2014
Editor/Editora: Springer Berlin Heidelberg
Livro na base de dados desde 2014-08-12T14:43:39-03:00 (Sao Paulo)
Página de detalhes modificada pela última vez em 2023-12-13T06:55:49-03:00 (Sao Paulo)
Número ISBN/EAN: 3642426867
Número ISBN - Ortografia alternativa:
3-642-42686-7, 978-3-642-42686-5
Ortografia alternativa e termos de pesquisa relacionados:
Autor do livro: bogdan, bog, bogdanow, janus, bogdanowicz
Título do livro: photo, optica, janusz
Dados da editora
Autor: Janusz Bogdanowicz
Título: Springer Theses; Photomodulated Optical Reflectance - A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon
Editora: Springer; Springer Berlin
204 Páginas
Ano de publicação: 2014-07-17
Berlin; Heidelberg; DE
Impresso / Feito em
Peso: 0,355 kg
Língua: Inglês
106,99 € (DE)
109,99 € (AT)
118,00 CHF (CH)
POD
XXIV, 204 p.
BC; Semiconductors; Hardcover, Softcover / Technik/Elektronik, Elektrotechnik, Nachrichtentechnik; Elektronische Geräte und Materialien; Verstehen; Dopant and Carrier Profiling; Electrooptical and Electrothermal Effects; Non-destructive Semiconductor Testing; Ultra-shallow Junction Characterization; carrier and Heat Transport in Highly Injected Semiconductors; Applied and Technical Physics; Semiconductors; Applied and Technical Physics; Angewandte Physik; BB
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.Outros livros adicionais, que poderiam ser muito similares com este livro:
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